Final Phase Systems (FPS) Joins the INFICON Family »
Save the Date! FabGuard User Group Meeting June 4-6, 2019 »
Come See Us at an Event Near You »
FabGuard APC v5.03.00 Release »
Simplifying FabGuard Configuration Backup »
APC Conference 2018: Legacy Control System Replacement »
APC Conference 2018: Integrating 3rd Party Sensors to Reduce Scrap Events Using FabGuard »
Restoring FabGuard Computers for 24/7 Sustaining »
Support for Microsoft OLE DB driver for SQL Server (MSOLEDBSQL) »
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End-of-Life Support for FabGuard Versions and Microsoft Products »
We are pleased to announce the release of FabGuard v18.11.00. The new version provides customers with monitoring tools for abatement and subfab equipment, automatic tools for better management of enterprise deployments, and greater sensor support to get more out of INFICON and 3rd party sensors.
In version 18.11.00, INFICON has extended the communication and analysis capabilities of FabGuard to monitor subfab equipment. Fault detection for facilities and support equipment is just as critical to manufacturing as the process tools they support. Additionally, INFICON has added the ability to cycle equipment into low-power/green states when it is determined that the equipment will be idle. The result is significant savings in factory consumables.
INFICON has integrated FPS Scheduling and Dashboard products with FabGuard data for better visualization and tracking of process states and transitions. Factories will gain accuracy in WiP scheduling and capacity planning.
Customers can collect the data that is relevant to tool and process control with enhanced sensor support and greater sensor integration capabilities. INFICON has expanded the number and types of supported sensors and increased control of existing sensor technologies.
Features |
Advantages |
Benefits |
|---|---|---|
Add Output Event channel for Abatement State On and Off |
Control when abatement equipment is in low-power/green mode |
Reduce costs of consumables and power |
Add FPS integration to Global Preferences so that there is no need to create Run Start/Stop and Fault Output triggers for every Chamber |
Reduce the set up time required to provide FabGuard data to FPS |
Sites that have FabGuard FDC and FPS scheduling systems can obtain more accurate scheduling using equipment data provided by FabGuard. This can result in higher production of priority devices |
Remove Backup Tasks and replace with automatic backup configured in Global Preferences |
Provide automatic backup and simplify enterprise set up |
Reduce configuration time and ensure that all components are backed up. This eliminates loss of configurations if there is a hardware failure |
Features |
Descriptions |
|---|---|
Save Alarms for Lot-by-Lot analysis to the database |
The Alarm entry in the database is attached to the last process record in each chamber that performs Lot-by-Lot analysis |
Allow I/O Channels to be disabled without being deleted |
I/O channels can be disabled. This allows a channel to be removed from use without removing it from the I/O Channel Manager |
Support for new MSOLEDBSQL driver for connection to MS SQL Server database |
The old SQLOLEDB driver is still supported |
Display how many Reports have not been applied to the data |
Two new columns in Web Tables and Executive Summary show how many Reports have not been applied in the past 24 hours |
Added new tool types |
LPI Robusta, AMAT Nokota, Tazmo CSX3382NP, GPTC UBM UFO Etcher, Ultratech AP300, SCREEN CW2000 |
In the Active Analyses dialog, mark Reports and Models that have a different version on FabGuard IPM than what is in the database. Also, if a Report or Model is missing from the database, this will be marked |
The Audit cell will be yellow if the Active Analysis is an earlier version in FabGuard IPM than what is present in the database |
EPI SPC Report enhancements |
Allow Dynamic SPC chart types and History Reset |
Add Ocean Optics STS spectrometer |
The STS spectrometer uses the same Ocean Optics OmniDriver as other Ocean Optics USB-based spectrometers |
Add "SQL" Connection type to IO Trigger Secondaries so that Metrology or EPI values can be retrieved from an external database |
Used in Equipment Triggers functions: Metrology from Secondary, EPI from Secondary, and Maintenance Indicator from Secondary |
Change appearance of Fab tab in FabGuard Web |
Changed the Fab tab (Board of Executives) in FabGuard Web to contain a grid of Executive icons instead of a circle |
Increase FabGuard Analysis Server file import rate |
FabGuard Analysis Server now searches for files to import every 1 second for all types of import files |
New Global Preference to configure what name is shown for Operator ID, Control Job, and Process Job |
The new preference can be found in Global Preferences >> Display >> Logistics Labels |
Add ability to split history of an SPC report by any combination of logistics |
Split by Recipe ID, Part ID, Layer ID, Technology ID, Extra 1 ID - Extra 8 ID, FOM Name, and Full FOM Name |