October 2017

FabGuard v17.10.00 Release »

SPC Effectiveness Metric: Are FabGuard Reports Working Correctly? »

Automatically Track Lot Processing Times for Industrial Engineering »

Automatically Calibrate Transpector® CPM RGA »

Modbus® TCP Connectivity in FabGuard »

Arc Detection using S-Probe Sensors on 200 mm High Density Plasma (HDP) Chambers »

Tips for Creating a Support Ticket »

Software Release

FabGuard v17.10.00 Release

Increase Factory Efficiency and Provide Increased Sensor Support with FabGuard v17.10.00 More »

New Features

SPC Effectiveness Metric: Are FabGuard Reports Working Correctly?

There is a question continually asked of the FabGuard team: Is FabGuard working correctly? What the questioner means is: Is FabGuard doing what I think it should be doing? More »

New Features

Automatically Track Lot Processing Times for Industrial Engineering

Unlike process engineers who are concerned with proper wafer chemistry or equipment engineers who are maintaining the tool hardware, industrial engineers are responsible predicting and monitoring tool utilization and loading. They make sure that the tool is processing as many wafers as possible, supervise Manufacturing Execution System (MES) wafer scheduling, and maintain the complex movement of wafers in the factory. More »

From the Field

Automatically Calibrate Transpector® CPM RGA

The goal of this document is provide an example of a Transpector 2 CPM which performs a calibration on a monthly basis when FabGuard® determines the tool is idle. More »

From the Field

Modbus® TCP Connectivity in FabGuard

Modbus is an open serial communication protocol that is widely used for communicating with industrial electronic devices. Integrating Modbus TCP into FabGuard allows factories to integrate, analyze, and control factory data from external devices such as bath concentration monitors.More »

From the Field

Arc Detection using S-Probe Sensors on 200 mm High Density Plasma (HDP) Chambers

The industry standard HDP chamber has three RF sources: top, side, and bias. Arcing is a significant issue that results in catastrophic scrap of product when it occurs. Detection is difficult and requires a third party sensor combined with high speed data collection capability. More »

Support

Tips for Creating a Support Ticket

Details are very important when trying to debug an issue. Typically, the more information you can include in the initial ticket, the faster and easier it will be to debug overall. More »

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E. Syracuse, NY 13057-9714 USA

Phone: 315-434-1100
E-mail: reachus@inficon.com
www.inficon.com

 

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