New Mobile Vacuum Leak Detector UL6000 Fab from INFICON Breaks New Leak Test Records in Semiconductor Manufacturing

Fast response times are essential to leak testing. Downtime can be costly and every second counts.

The UL6000 Fab Mobile Vacuum Leak Detector from INFICON is a new helium leak detector for leak testing applications in large-volume production lines, such as in the semiconductor industry. The unit is extremely fast and precise, to minimize downtime and maximize output of your leak test sequence. It uses two innovative pumps to find even the smallest leaks in record time. With more than 36 L/s, its new booster pump provides the best helium pumping speed on the market. Additionally, a long-lasting roots pump, with an air pumping capacity of 36 m³ per hour, accelerates evacuation of big volumes.

The UL6000 Fab has a slim design and rugged construction, for easy maneuverability and access in all test areas. If the space conditions are limited, it can be operated remotely with the help of a web app and wireless remote controller.

The unit also ensures great precision during leak testing thanks to its HYDRO·S eliminating the water content in the signal to quickly reach a low background; and I·ZERO 2.0 suppresses the helium background to a minimum without impacting the accuracy of the test. The unit also has I·CAL software which reduces noise to a minimum without missing details such as the smallest leak rate peaks.

The UL6000 Fab has been developed for use in the semiconductor, solar cell and flat panel display manufacturing, for glass and plastic foil coating and vacuum systems.

Take a look at the UL6000 Fab video to find out more about the UL6000 Fab Helium Leak Detector. And, for more information on the most precise, durable and reliable testing system on the market, contact your nearest INFICON office.