New Products

Introducing FabGuard APC

The FabGuard Advanced Process Control (APC) system provides a framework for developing run-by-run process control strategies and related automation solutions, such as executing metrology sampling plans. More »

New Features

Allow FabGuard to be installed in locations other than C:\Inficon

All FabGuard products have always been installed in the folder C:\Inficon. Some customers, or their IT departments, would rather install FabGuard to a different location. More »

From the Field

Tracking Clean Recipes Using FabGuard Equipment Performance Indicators

Track the time between clean recipe executions and place limits on clean recipe(s) that have not run within a specified time. More »

From the Field

Creating a Signal Bin Filter to Remove Erroneous Data

The polish head spin speed Status Variable ID (SVID) in revolutions per minute (RPM) is intermittently reported as “zero” during the main processing step of a tool recipe. The complication is that the tool is actually reporting a number, zero, and not reporting an empty value when data is dropped. More »