Software Release
Increase Factory Efficiency and Provide Increased Sensor Support with FabGuard v17.10.00 More »
New Features
There is a question continually asked of the FabGuard team: Is FabGuard working correctly? What the questioner means is: Is FabGuard doing what I think it should be doing? More »
New Features
Unlike process engineers who are concerned with proper wafer chemistry or equipment engineers who are maintaining the tool hardware, industrial engineers are responsible predicting and monitoring tool utilization and loading. They make sure that the tool is processing as many wafers as possible, supervise Manufacturing Execution System (MES) wafer scheduling, and maintain the complex movement of wafers in the factory. More »
From the Field
The goal of this document is provide an example of a Transpector 2 CPM which performs a calibration on a monthly basis when FabGuard® determines the tool is idle. More »
From the Field
Modbus is an open serial communication protocol that is widely used for communicating with industrial electronic devices. Integrating Modbus TCP into FabGuard allows factories to integrate, analyze, and control factory data from external devices such as bath concentration monitors.More » From the Field
The industry standard HDP chamber has three RF sources: top, side, and bias. Arcing is a significant issue that results in catastrophic scrap of product when it occurs. Detection is difficult and requires a third party sensor combined with high speed data collection capability. More »
Support
Details are very important when trying to debug an issue. Typically, the more information you can include in the initial ticket, the faster and easier it will be to debug overall. More »
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