FabGuard v17.10.00 Release

Increase Factory Efficiency and Provide Increased Sensor Support with FabGuard v17.10.00

We are pleased to announce the release of FabGuard v17.10.00. The new version provides customers with visualization tools for analyzing factory efficiency and increased sensor support tools for getting more out of their INFICON sensors.

New displays and dashboards have been added to FabGuard Web that provide instantaneous and real-time descriptions of throughput, health, and FDC capability of process equipment. This allows end users to monitor equipment with low throughput or discover issues with the application of FDC analyses. Correcting these issues helps maintain factory efficiency and ensures that FDC analyses are optimal.

Customers can get more out of their RGA sensors using the increased sensor tuning flexibility and data collection capabilities. Greater flexibility in tuning provides customers with more control over how the RGA is tuned. With added support for advanced I/O and data extraction, customers have access to more data for excursion detection and to perform real-time interdictions.

Key Features
Features	Advantages	Benefits
Interactive RGA Tuning	Allow RGA Ionizer settings to be adjusted in real-time during a tuning cycle	Improved control over tuning for more accurate RGA measurements
Redesign Web Dashboard to add capabilities for monitoring and viewing equipment utilization	Real-time view of equipment utilization, throughput, and analysis health	Real-time view of equipment utilization, throughput, and analysis health to ensure optimal factory operations
Interface A (Freeze 2) Communication Protocol	High speed data collection to support next generation semiconductor equipment	Easy integration of FabGuard into facilities that utilize Interface A for tool communication
Analysis Effectiveness	Real-time web dashboard to monitor the effectiveness of analyses	Validate that all configured analyses are working as expected and that processes are well covered
Golden Deviation Analysis	Compare current data with initial data to monitor for drifts or shifts. Figure of merit or real-time trace data can use the Golden Deviation analysis	Simple analysis to monitor changes from an initial processing state. Decrease overall set up time and easily increase analysis coverage

Highlighted Features
Feature	Description
New logistics	New logistics for better tracking of processes (Extra4, Extra5, Control Job, and Process Job)
Filtering of items in grid displays	Added text filtering in grids to provide users easer methods for finding and editing items in the grid (Recipe dialogs and Acquisition Dictionary)
File compression for archiving data	Created an option to save time series data to a zip archive automatically. The FabGuard Archive Task can then move the zip file to an archive directory
LDAP failover support	Provide configuration for a secondary LDAP server to support login when the primary LDAP server is down
Tool Area description	New field to assign a tool to a Process Area for filtering. Tool Areas can be predefined to limit typing errors. Tool area is in addition to Tool description in the IPM configuration
Linked EPI Triggers	Created new Equipment Performance Indicators to verify that specific triggers happen in a specific order. These will be used to ensure that tool functions happen in a specific order
Increased Alarm information	Added additional fault information including Fault Outcome, Code and Comments. Increased options for pulling faults and alarm information in reports
Health and Fault Contributions	Drill down from Equipment and Process Health calculations to contributing data. Engineers are now able to determine what signals are causing poor Health estimates
Hold a Signal Bin Value	New hold function that allows a signal bin to maintain the last valid value
Verify Figures of Merit created by I/O are analyzed	Mark a Figure of Merit generated by an I/O trigger so that analysis is required. An alarm will be generated if the Figure of Merit is not analyzed
Equipment Utilization for Industrial Engineering	New methods for analyzing throughput and usage for factory equipment to support factory capacity planning
RGA Tag and Background scans	Created a function to set RGA tag or background scans as part of step acquisition control. Developed a signal bin to extract a signal from RGA tag scans
Detailed RGA information extraction	Pull additional configuration information from RGAs and display the key configuration information in FabGuard Web
Advanced IO support for Transpector® MPx RGAs	Added support for the advanced IO board of Transpector MPx class RGAs