Revision tracking is a key feature of FabGuard that allows factory personnel to easily visualize and track changes to Acquisition and Analysis setup. FabGuard increments the revision number after editing one of the following: Connections, I/O, Recipe Plans, Recipes, Reports, Models, or Tasks. This allows for unambiguous tracking of which revision was used for what time, for which process, and for which substrate. Revision also enables tracking of changes in Acquisition and Analysis configurations for the past 24 hours and the past 7 days. Finally, revisions allow for reverting to any of the previous revision.
To further enhance the revision tracking system, the user now has the ability to mark a specific revision as Golden. Marking a revision as Golden enables two key features:
The current revision is shown in multiple dialogs and screens in FabGuard. FabGuard Web also summarizes the Golden revisions and changes to Acquisition and Analyses both in table views for Executive, Group and individual Tool, and in the Executive Summary.
Figure 1 shows a section of the FabGuard Web display in Executive Summary. The Configuration section shows:
Revisions can be managed individually, i.e. as part of editing I/O, Recipe Plans, or Recipes. Revisions can also be managed centrally for multiple FabGuard IPMs in the Multi Tool Revision and Lock Manager accessible via the FabGuard Client.
Figure 2 shows the Reports tab of the Multi Tool Revision and Lock Manager. The user can mark any current revision for a Report as Golden as well as lock any Report to the user access level required to make changes to the Report.
The combination of three key FabGuard systems, revision, security, and web, allows fab personnel to quickly visualize and manage changes to Acquisition and Analysis setup.